BGA-205 gas analyzer is introduced for trace impurity determination in H gas using H-storage alloy for major component separationThe apparatus can also be used for the anal. of N and O.Gas chromatog. with photoionization detection or mass spectrometric detection are applied.

Koatsu Gasu

Development of pretreatment apparatus for determination of trace impurities in high-purity gases by highly sensitive gas chromatography

Author: Aomura, Yoko ; Hirako, Keiji ; Furuno, Masahiro ; Ogino, Hiroshi

Trace impurities in high-purity O, H, or N were determined by removal of main component gas with base gas absorber followed by gas chromatog. with photoionization detection.O was removed by Cu catalyst at 140°, H was removed by LaNi₅ at 25°, and N was removed by Ti alloy at 250° followed by LaNi₅ at 25°.The calibration graph was linear for <5 ppm Ne, N, Ar, Kr, Xe, and CH₄ in O.The determination limits of Ne, N, Ar, Kr, Xe, and CH₄ were 3.8, 0.04, 0.03, 0.01, 0.01, and 0.02 ppm, resp., for O; 5.0, 0.06, 0.05, 0.02, 0.02, and 0.04 ppm, resp. for H; and 3.7, -, 0.08, 0.03, 0.09, and 0.04 ppm, resp. for N.CO, CO₂, N₂O, NO, and NO₂ were not determined by the method.

Koatsu Gasu

Development and evaluation of trace oxygen analyzer

Author: Sakai, Nobuyuki ; Maruyama, Osamu ; Ogino, Hiroshi

A galvanic cell type oxygen gas analyzer using a Ag mesh electrode and a Pb counter electrode, and 5M KOH solution supported in zeolite was developed.The analyzer is used to detect trace amounts of oxygen in semiconductor grade Ar, He, N₂, or H₂ gases.The O₂ concentration is measured quant. by recording the current passed through the electrolytic cell; theor. 25.1 μA is passed when 1.0 ppm oxygen is electrolyzed as:O₂ + 2H₂O + 4e^- → 4OH^-, 2Pb + 4OH^- → 2Pb(OH)₂ + 4e^-.The analyzer can be calibrated with 1, 5, and 10 ppm standard O₂ gas prepared by water electrolysis.It provided a rapid response within 2 min in terms of 90% rise time for the O₂ concentration change from less than 2 ppb to 0.2 ppm.The responses had good reproducibility and stability in continuous operation over 65 h.The analyzer is limited to the gases which do not contain acidic components such as HCl or CO₂, or Br₂, Cl₂, SO₂, or NO₂ which react with the Ag electrode.

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