Positioners based on near-field acoustic levitation (NFAL) offer high positioning resolution and bandwidth, primarily along the Z axis, because of the large acoustic Z-stiffness and squeeze film damping.However, their XY-positioning resolution and bandwidth are several orders of magnitude lower because of the limited acoustic stiffness and damping in these directions.In this paper, we increase the XY-stiffness and damping by using a steady-current-based planar electromagnetic trap and eddy current damping technique, resp.Specifically, NFAL is used to levitate a magnetic platform, which is then electromagnetically trapped in the XY-plane.Eddy currents generated by a thin copper plate beneath the levitating platform increase in-plane damping by a factor of 52, thereby reducing vibrations inherent in the NFAL technique.Addnl., the planar coil used for electromagnetic trapping provides multi-axis positioning capabilities.We demonstrate 3-axis linear motion with a root mean square (rms) positioning resolution of better than 20 nm along all axes.The in-plane motion range and bandwidth achieved are 1.42 mm and 16 Hz, resp., while a motion range of 40μm with a positioning bandwidth of 171 Hz is achieved along the Z-axis.