More measurements indicated some inconsistency with the earlier findings.The thermal conductivity values of BK7 glass in the latest measurements are found somewhat higher than the earlier measurements, particularly at lower film thicknesses.The BK7 samples' values at thickness ratio t<5 are very close to the values of the nonetched silicon samples.The reason for the difference between the latest and earliest measurements is probably due to some hydrofluoric acid etching on some of the earlier lower-film-thickness BK7 samples.The grain size measurements contained some errors; the corrected grain sizes for the nonetched Si(100) samples are given.The growth of both the {111} and {220} grains slows down after 97 nm.The drop in thermal conductivity at t∼5 (corresponding to film thickness of 200 nm) is mainly due to the drop of {220} grain size.

17 May 1999·Applied Physics Letters

Thermal conductivities of evaporated gold films on silicon and glass

Author: Chen, George ; Hui, Ping

We present four-point probe measurements of the in-plane electrical conductivities of electron beam-evaporated gold layers of thickness 20 nm to 2 μm deposited on Si(100), Si(111), and BK7 glass substrates. The values of thermal conductivities deduced from these measurements of gold films on glass samples agree well with prediction from the surface and grain-boundary scattering model, but not for gold films on silicon samples. Thermal conductivities of gold films are found to be different for samples on hydrofluoric acid etched Si(100) and Si(111) substrates, for which surface roughness and microstructures of the gold films have been examined to understand the difference in these thermal conductivity results.

Proceedings of SPIE-The International Society for Optical Engineering

Pulsed photothermal measurement of tetrahedral amorphous carbon (ta-C) film

Author: Chen, George ; Hui, Ping

Pulsed photothermal reflection technique is developed to measure the thermal conductivity of tetrahedral amorphous C (ta-C) films.This technique is basically a pump and probe type.The pump source is Nd YAG laser, pulse width 8 ns, is operated at 532 nm with 1 mJ.The sample is deposited on Si wafer and over-coated with a Au layer for heat absorption.Upon the laser pulse strikes on the sample surface, the surface temperature rises sharply and then relaxes with time.A continuous HeNe laser (1 mW) probes the surface temperature, measuring the reflectivity changes on the sample's surface.Since the reflectivity and temperature has an inverse linear relation, the relaxed temperature profile can be obtained by inverting the captured reflectivity profile.Using either 2-layer or 3-layer heat conduction model, thermal properties of the ta-C film are then varied to fit the obtained profile.The fitted thermal conductivity value of the ta-C film is ∼2 W/mK.

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