In this study, the phase transitions of mono-disperse poly(ethylene oxide), PEO_n, thin films with thickness less than 1 μm were investigated as a function of sample mass which was proportional to sample thickness.The solvent cast PEO_n thin films consisted of the crystal lamella oriented to in-plane and out of plane directions showed several melting peaks on DSC heating curves.However PEO_n thin films prepared by slow cooling from the molten state showed branch-like crystal lamella with homogeneous thickness and a single melting peak on DSC heating curves.The crystallization process of PEO_n on cooling was restricted strongly with the decrease of sample mass.The crystallization exothermic peak became broader and smaller with the decrease of sample mass, and was varnished for PEO thin film less than 200 nm thickness.

02 Jul 2013·SPIE Proceedings

Repair Technology for Large Scale Photomasks

Author: Koyama, Yoshihiro ; Momota, Hiroumi ; Aramaki, Fumio ; Aso, Mitsuto ; Okabe, Mamoru ; Nakagawa, Yoshitomo ; Muramatsu, Masashi ; Takiguchi, Hideki ; Kozakai, Tomokazu

Repair technologies by using focused ion beam (FIB) and laser have been applied to large scale photomasks for flat panel displays (FPD).In recent years, repair accuracy requirement for FPD masks has been higher than before.In this study, the authors investigated the repair accuracy improvement by modifying imaging conditions and process scanning.As improvement of imaging conditions, beam diameter was shrunken to be about half of the original.Pixel pitch of imaging was shrunken to be 4 times as small as the original.As improvement of process scanning, scanning method was changed from raster type to vector type.Actual repair accuracy was evaluated by measuring repair edge positions on scanning ion microscopy (SIM) images after etching or deposition.The original repair accuracies were 238 nm and 150 nm @ 3sigma, but those in the most improved cases were only 23 nm and 20 nm @ 3sigma which is 10 times as small as the originals.Those results demonstrate that the above modification can significantly improve repair accuracy.

01 May 2012·Journal of Low Temperature Physics

Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

Author: N. Yamasaki ; T. Yasumune ; Syo Matsumura ; Naoko Iyomoto ; Keisuke Maehata ; M. Maeda ; T. Hara ; K. Tanaka ; K. Mitsuda

A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter-array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope.For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber.The mushroom shaped absorber is made from a Au layer of 0.5 μm thick.Geometrical dimensions of the surface area of the TES and the absorber are 350 μm×350 μm and 330 μm×330 μm, resp.The absorber stem of 150 μm×150 μm in the cross sectional area is deposited on the center of the TES surface.A Ta₂O₅ insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface.One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an ⁵⁵Fe source.

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